Micro-Inertial – High-precision MEMS Inertial Sensors and IMUs

Precision motion sensing for GPS-augmentation and autonomous vehicles

Innovative high-performance accelerometers, gyroscopes, and IMUs based on silicon MEMS

Accurate sensing for guided downhole navigation and platform stabilization

Precision Motion Sensing in Harsh Temperature and Vibration Conditions

Robust IMU, accelerometer, and gyroscope systems that deliver new levels of performance and reliability with broad temperature stability (-40°C – 120°C), high vibration immunity, scale-factor less than 10ppm and bias drift less than 1 deg/hr.

Patented MEMS and Micro-Packaging Technology

Our innovative core technologies in ruggedized high-performance sensing, MEMS manufacturing, 3D packaging, and integrated electronics have been developed over nearly a decade of research and testing, with partial support from National Aeronautics and Space Administration (NASA), Air Force Research Laboratory (ARFL), and Defense Advanced Research Projects Agency (DARPA).

Micro-Inertial’s MEMS-based sensors offer reliability, precision, low power consumption, and environmental tolerance in our high performance IMU, accelerometer, and gyroscope systems — meeting the demanding requirements of a broad range of commercial applications.

Rugged Sensor Performance in Small IMU Packages

Developed for High Performance

Micro-Inertial delivers high sensor performance in rugged environments where vibrations, wide temperature ranges, and other conditions may cause less-specialized sensor systems to fail.

Our solutions combine all-silicon, wafer-level sensors with micro-packaging technologies and leading integrated electronics in customized IMU system designs. This provides improved accuracy and inertial navigation capability in systems of minimal size, weight, power, and cost.

Sensor & 6-Axis IMU

Gyroscope chips: <1deg/hr gyroscope bias, <0.1deg/rt-hr ARW in -40°C to 120°C, with 10ppm scale factor and bias drift in the entire temperature range Accelerometer chips: <1mg bias and VRW<0.1m/sec/rt-hr in -40°C to 120^°C, with 10ppm scale factor and bias drift in the entire temperature range

Applications of Micro-Inertial Technology

Micro-Inertial IMUs for guidance and navigation

UAV Guidance and navigation
(GPS-aided and GPS-denied)

Micro-Inertial IMUs for autonomous vehicles

Dead-reckoning for autonomous vehicles

Platform stabilization and antenna positioning

Robotics positioning and UGV navigation

Next-generation virtual reality

Micro-Inertial’s specialized expertise in ruggedized, high-performance, MEMS-based inertial measurement units (IMUs) grew out of the pioneering work of Evigia Systems, Inc. in high-precision inertial sensors. Since 2004, Evigia has been a recognized leader and innovator in sensing technologies, products, and solutions for the Internet of Things and other high-end sensing applications. Evigia spun off Micro-Inertial as a distinct IMU-focused company in 2016. Evigia and Micro-Inertial, LLC are headquartered in Ann Arbor, Michigan.

Contact Micro-Inertial for more information

Our engineers love to talk about motion sensing challenges! Please tell us about your requirements: